The Helium Ion Microscope promises to advance biological, geochemical, biogeochemical, and surface/interface studies using its combined surface sensitivity and high-resolution microscopy functions. The HIM is equipped with a Rutherford Backscattering Spectrometry (RBS) capability that identifies atomic elements. In the future, the RBS capability will allow 3-D chemical analysis when paired with an improved spectrum detector. EMSL’S Helium Ion Microscope Offers:
– Ultra-high resolution — reveals fine structure details and allows chemical visualization of nanostructures and biological samples, including those with low-Z elements
– RBS — identifies atomic elements and determines material composition using a sub-nanometer He+ ion probe
– Charge neutralization — uses an electron flood gun to neutralize charge for insulating samples based on line or frame scans
– Small beam size — provides stable beam energy and current over a period of time using one of 24 selectable apertures measuring 5, 10, or 20 µm in diameter
– Novel features — offers EMSL users an additional 4.5-inch center port and two 2.75-inch ports for other characterization capabilities.